SELECTED EXPERIMENTS IN SILICON INTEGRATED DEVICE TECHNOLOGY.

Abstract

The experimental work that was performed as supplementary investigation to the preparation of the 'Silicon Integrated Device Technology' series is presented. In addition to the five volumes of this series that were compiled, supporting experimental work was done in three areas: (1) anodic oxidation of silicon for integrated circuits; (2) statistical methods for the evaluation of laboratory processes, steam oxidation of silicon was the process considered initially; and (3) impurity diffusion into silicon from a gas source. Phosphine gas was the first impurity gas investigated. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1964
Accession Number
AD0432171

Entities

People

  • R. M. Burger

Organizations

  • RTI International

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Buildings And Structures
  • Circuits
  • Diffusion
  • Electronics Laboratories
  • Impurities
  • Integrated Circuits
  • Oxidation
  • Phosphine
  • Research Facilities
  • Test And Evaluation

Readers

  • Internal Combustion Engine (ICE) Technology.
  • Semiconductor Device Technology
  • Systems Analysis and Design