MINIATURE THIN FILM INDUCTORS (MODIFICATION NO. 2).

Abstract

A program is described for fabricating miniature thin-film inductors. These inductors use flat spiral conducting paths on bulk ferrite substrates encapsulated with depositied ferrite film. The period covered from 1 December 1963 to 1 March 1964. Four tasks, all directed toward the problem of obtaining larger inductance values, have been pursued during this period. They are: (1) Study the effect of ferrite material thickness on the inductance of an encapsulated coil; it was determined that a 40-mil (1000 micron) thick layer of material is required for maximum permeability effect. (2) Fabricate spiral coils of increased air core inductance: The 1.8 microhenry 23-turn coil has not been completed. (3) Fabricate spiral coils of a gold-rhodium alloy so that a ferrite film deposited encapsulating these coils can be annealed or sintered at elevated temperatures, i.e., greater than 1050 C. (4) Study techniques for fabricating two coils in a mutually aiding inductive geometry on a single substrate. The coils are separated by a ferrite film deposit: Absorption of the gold plating solution by the ferrite has been a problem. This prevented the fabrication of a complete unit for evaluation. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1964
Accession Number
AD0434051

Entities

People

  • F. R. Gleason

Organizations

  • Motorola Mobility

Tags

DTIC Thesaurus Topics

  • Films
  • Geometry
  • Inductance
  • Inductors
  • Materials
  • Rhodium
  • Rhodium Alloys
  • Substrates
  • Thickness
  • Thin Films

Readers

  • Electrical Engineering
  • Thin Film Deposition Science.