EPITAXIAL VAPOR GROWTH OF III-V COMPOUNDS.
Abstract
This work describes an open-tube method for epitaxial growth of III-V compounds using heterogeneous, gas-solid chemical reactions. Different techniques and reactions are briefly discussed and a simplified model is exposed to a thermodynamic treatment to clarify how different parameters influence the growth process. The experimental apparatus and procedure are outlined and data are given for the growth of the two compound semiconductors, GaAs and GaP, as well as for the ternary GaAs(x)P(1-x) mixtures. Also mentioned is the fabrication of heterojunctions, the possibilities of doping, and closed-tube growth processes. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1963
- Accession Number
- AD0434756
Entities
People
- James F. Gibbons
- P. C. Prehn
Organizations
- Stanford University