INVESTIGATION OF HIGH POWER GASEOUS ELECTRONICS.
Abstract
A theoretical expression is derived for the clean-up of gas at the interface between a high power microwave discharge and a dielectric surface. Gas clean-up is described in terms of sticking times and the energy of activation for diffusion into the solid of gas trapped at the surface. Agreement was obtained between theory and experiment for the clean-up of helium, neon, and argon at a quartz surface. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 15, 1964
- Accession Number
- AD0438865
Entities
People
- H. S. Maddix
- J. Gregory
Organizations
- M/A-COM Technology Solutions