ALL-EVAPORATED AND MASKLESS FABRICATION TECHNIQUES FOR ACTIVE DEVICES.
Abstract
The literature search and the detailed planning of the program are essentially complete. Study of work published since the preparation of the proposal has shown that a great emphasis must be placed on achieving good vacuum conditions. Accordingly, the silicon evaporation studies will be carried out in a Varian ion-pumped titanium-gettered system capable of 10 to the -10th power Torr. The ion implantation studies will be carried out in a CVC system capable of 10 to the -8th power Torr. The design of the required fixturing is essentially complete. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 09, 1964
- Accession Number
- AD0447445