THIN FILM TECHNIQUES FOR SILICON INTEGRATED CIRCUITS.
Abstract
This report concerns: (1) installation of a water cooled crucible in the electron gun evaporator, (2) evaluation of various cermet powders, including carbides, borides and silicides, (3) further progress on the Basic Resistor Analysis Program mask set, (4) further progress on plasma anodization, (5) continued processing on a thin film logic gate, (6) completion of breadboarding and a preliminary mask set for the linear broadband amplifier, (7) progress on breadboarding a resistor-capacitor-transistor circuit; and (8) life test data on deposited glass dielectric capacitors. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 30, 1964
- Accession Number
- AD0458535
Entities
Organizations
- Motorola Mobility