METAL-ORGANIC COMPOUNDS FOR VAPOR PLATING APPLICATION.
Abstract
This report covers progress in studies of the feasibility of vapor plating by depositing metals from selected metal-organics. The metals under study include Al, B, Nb, Hf, Mo, Si, Ta, Ti. Relatively pure deposits of Al and B were produced, as well as a pure codeposit of Al-Ta. The most promising results to date are single deposits of Mo and Ti and codeposits of Mo-Si and B-Ti. Use of NH3 as an additive in the H2 carrier gas stream significantly reduced the decomposition temperature of dicyclopentadienyl hafnium dichloride. Future plans are to continue studies on the deposition of single metals, on codeposition from single metal-organics and from two metal-organics simultaneously, and on the use of NH3 and other reducing gases as carrier gases. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1965
- Accession Number
- AD0476821
Entities
People
- E. B. Rifkin
- J. Kozikowski
- L. M. Niebylski
- R. D. Stevenson
- R. L. Mack