THE BERKELEY SCANNING ELECTRON MICROSCOPE-I.

Abstract

This report describes the Berkeley Scanning Electron Microscope-I. The principles of operation of a scanning electron microscope and the design criteria for this particular microscope are stated in the introduction. The vacuum system, the electron-optics, the mechanical construction, and the circuits used in this instrument are described in subsequent sections. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 27, 1966
Accession Number
AD0485293

Entities

People

  • R. F. W. Pease
  • S. R. Pedersen
  • T. E. Everhart

Organizations

  • University of California, Berkeley

Tags

DTIC Thesaurus Topics

  • Construction
  • Design Criteria
  • Electron Microscopes
  • Electron Optics
  • Electrons
  • Microscopes
  • Optical Equipment
  • Optical Magnification Devices
  • Optics
  • Scanning
  • Scanning Electron Microscopes

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics