SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS.

Abstract

Semiconductor surface damage, produced by a focused beam of ruby laser light, consisted of regular patterns of cracks and a system of parallel straight lines. The system of grooves (spacing of about 0.0001 cm) can be explained on the basis of diffraction effects at the focus of a lens. The regular crack patterns were related to the cleavage habits of the semiconductors by x-ray analysis. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1966
Accession Number
AD0488452

Entities

People

  • Milton Birnbaum

Organizations

  • The Aerospace Corporation

Tags

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Compound Semiconductors
  • Diffraction
  • Electronics
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Lasers
  • Ruby Lasers
  • Semiconductors
  • Silicon Carbide
  • Silicon Compounds
  • Solid State Electronics
  • X Rays

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Optical Physics and Photonics.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Space