DEVELOPMENT ON HIGH TEMPERATURE INSULATION MATERIALS.

Abstract

Aluminum nitride films have been pyrolytically deposited on molybdenum rods and wires using AlCl3 and NH3 as starting materials. The effect which polishing, siliconizing and sandblasting of molybdenum substrates have on the integrity of deposited silicon nitride coatings is being examined. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1966
Accession Number
AD0489914

Entities

People

  • D. Berg
  • D. W. Lewis
  • J. N. Esposito
  • T. W. Dakin

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Aluminum Nitrides
  • Ceramic Materials
  • Coatings
  • High Temperature
  • Insulation
  • Materials
  • Molybdenum
  • Nitrides
  • Polishing
  • Substrates

Fields of Study

  • Materials science

Readers

  • Combustion science or combustion engineering.
  • Surface Engineering/Surface Coating Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene