THE STRUCTURE AND STRENGTH OF EPITAXIAL FILMS.

Abstract

Most of the experimental equipment, designed for deposition and evaluation of epitaxial films on single crystal substrates, has been assembled. Discussions and photographs of the evaporation oven, substrate holder, vacuum system, and stress mechanism are presented. Brief reviews are given on the design of a strain measuring system and of plans for future work. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 15, 1964
Accession Number
AD0600149

Entities

Organizations

  • MRIGlobal

Tags

DTIC Thesaurus Topics

  • Crystals
  • Evaporation
  • Photographic Materials
  • Photographs
  • Photography
  • Single Crystals
  • Substrates
  • Test And Evaluation
  • Test Equipment

Fields of Study

  • Engineering
  • Physics

Readers

  • Business Analytics
  • Thin Film Deposition Science.