THE STRUCTURE AND STRENGTH OF EPITAXIAL FILMS.
Abstract
Most of the experimental equipment, designed for deposition and evaluation of epitaxial films on single crystal substrates, has been assembled. Discussions and photographs of the evaporation oven, substrate holder, vacuum system, and stress mechanism are presented. Brief reviews are given on the design of a strain measuring system and of plans for future work. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 15, 1964
- Accession Number
- AD0600149
Entities
Organizations
- MRIGlobal