PROBE CHARACTERISTICS OBTAINABLE USING DIFFERENT PROBE TYPES IN THE PLASMA OF A GAS DISCHARGE IN MERCURY AND CESIUM VAPORS AND INVESTIGATION OF THE ENERGY DISTRIBUTION OF NICKEL ATOMS DURING CATHODE SPUTTERING OF NICKEL BY MERCURY IONS,

Abstract

A comparative study of the probe characteristics of electron and ion currents in one-electrode (cylindrical and flat), two-, three-, and four-electrode flat probes was carried out. The conclusion was reached that the fullest and most correct information about the distribution of electrons and ions in a plasma can be obtained with the help of three- and fourelectrode probes. Electron and ion temperature measurements were made in a cesium and mercury gas-discharge plasma of low pressure. (Ionov and Tontegode) To investigate energy distribution a stream of neutral particles is passed through a mercury arc plasma of low pressure and the resulting ions are subjected to analysis. A neutral atom stream was investigated which was obtained as a result of bombarding nickel with mercury ions with an energy of 200-800 ev. An energy distribution was obtained for sputtered nickel in the energy region w > 10 ev. The relative quantity of fast atoms and the maximum energies grow as the energy of bombarded ions grows. The dependence of the stream of sputtered particles on the temperature of the target was investigated. (Ben'yaminovich and Veksler)

Document Details

Document Type
Technical Report
Publication Date
Jun 03, 1964
Accession Number
AD0601564

Entities

People

  • A. Ya. Tontegode
  • M. B. Ben'yaminovich
  • N. I. Ionov
  • V. I. Veksler

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Electrodes
  • Electrons
  • Gas Discharges
  • Measurement
  • Particles
  • Pressure Distribution
  • Pressure Measurement
  • Sputtering

Fields of Study

  • Physics

Readers

  • Quantum Chemistry
  • Solar Physics
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene