TITANIUM GETTERING OF CHEMICALLY INACTIVE GASES BY MEANS OF IONIZATION,

Abstract

The report deals with an exploratory experimental study of gas ionization to enhance the removal of chemically inert gases from a titanium getter pump. Gas ionization was accomplished in the free-molecule region by bombardment of the gas molecules with the electrons of a diode current where the anode was specially designed to produce a high density region of ionizing electrons. The pumping speeds for argon, methane, and helium were experimentally measured. The dependence of ion pumping speed on the rate of titanium evaporation was observed and is discussed in terms of the mechanism of ion removal. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1964
Accession Number
AD0601604

Entities

People

  • B. A. Mccullough
  • S. M. Kindall

Organizations

  • Arnold Engineering Development Complex

Tags

DTIC Thesaurus Topics

  • Chemical Reactions
  • Electrons
  • Evaporation
  • Gas Ionization
  • Gettering
  • High Density
  • Ionization
  • Molecules
  • Titanium

Fields of Study

  • Physics

Readers

  • Combustion and Flow Dynamics.
  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics