PRODUCTION ENGINEERING MEASURES TO INCREASE TRANSISTOR RELIABILITY. PROCESS SPECIFICATIONS. 2N744 SERIES.
Abstract
Process specifications and methods for the manufacture of transistors of increased reliability are outlined. Topics in the report include: (1) HCL etching of epitaxial substrates; (2) measuring silicon epitaxial film thickness, I. R. Spectrophotometer method; (3) measuring silicon epitaxial resistivity; (4) cleaning slices, silicon organic removal, Walking Beam Machine method; (5) depositing (Boron B203 Box) slices, silicon planar; (6) operating dryer system, Kemp model 15 EM-1; (7) depositing (ammonium phosphate emitter) slices, silicon planar; (8) purifying KMER, silicon transistors; (9) cleaning and drying (prephoto resist) slices, silicon; (10) exposing photo resist coated slices; (11) developing slices, silicon (exposed, KMER coated); (12) mixing solution, Bell Etch No. 2-A; (13) metalizing (gold collector) slice, silicon planar; (14) alloying contacts (infrared) silicon; and (15) Header-TO-18.025 Post.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 30, 1964
- Accession Number
- AD0601955
Entities
Organizations
- Texas Instruments