A MEASUREMENT TECHNIQUE FOR VACUUMDEPOSITED THIN FILMS,
Abstract
This report presents a laboratory method for the measurement of evaporated thin films in the range 10 to 10,000 Angstroms. Utilizing a multiple beam technique, employing fringes of equal chromatic order and a unique sample holder, films have been measured to a precision of = 15 A. The simplicity of the components employed is an outstanding feature of the experimental system. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1964
- Accession Number
- AD0603706
Entities
People
- Phillip A. Newman
- Richard F. Sette
Organizations
- United States Army Communications-Electronics Command