DEPOSITION OF TUNGSTEN BY REDUCTION OF THE HEXAFLUORIDE WITH HYDROGEN IN THE VAPOR PHASE.

Abstract

The previous report dealt with the equipment required for the study of the properties of tungsten deposited by the vapor phase method (See N64-21347). The development of equipment and devices for testing the properties of the deposits was continued, but the deposition of specimens of tungsten for test purposes was also initiated, and some measurements were made on the density and electrical resistivity. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 14, 1964
Accession Number
AD0605597

Entities

People

  • Abner Brenner
  • Jean H. Connor

Organizations

  • National Institute of Standards and Technology

Tags

DTIC Thesaurus Topics

  • Elements
  • Hydrogen
  • Measurement
  • Phase
  • Tungsten
  • Vapor Phases

Fields of Study

  • Materials science

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Software Engineering