PRESSURE TRANSDUCER FOR MEASURING SHOCK WAVE PROFILES ADDITIONAL GAGE DEVELOPMENT.
Abstract
A method was developed for the fabrication of transducers which incorporate a vacuum deposited layer as the piezoresistive element. The layer is deposited on a polished insulator surface to a thickness of the order of 0.0001 inch. A parallel faced slab of insulator is bonded to the polished surface after deposition of the piezoresistive element.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 04, 1964
- Accession Number
- AD0607939
Entities
People
- R. F. Williams
Organizations
- SRI International