SPUTTERING.
Abstract
Energy distributions have been determined for atoms sputtered from polycrystalline targets for twenty-three different target materials. Ejection energies are found to depend strongly on the mass of the target atom. Most probable and average ejection energies plotted as a function of the atomic number of the target material show a periodicity in that within each period these energies tend to decrease with increased filling of the d-shell. Average ejection energies range from 6.8 eV for Be to 45 eV for U. Average ejection velocities group mostly around 600,000 cm/sec and range from a high of 1,100,000 cm/sec for Be to a low of 390,000 cm/sec for Ag. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 24, 1964
- Accession Number
- AD0608946
Entities
People
- G. K. Wehner
- R. V. Stuart