STUDY OF SURFACE STATES IN SEMICONDUCTORS.

Abstract

Using the pulsed field effect, surface state studies were conducted on silicon surfaces oxidized by two methods, thermal oxidation in steam and anodic oxidation. The n-type samples which were thermally oxidized showed an activation energy of 0.51 eV, capture cross section of 3 x 10 to the 16th power, and density of 10 to the 10th power 1 sq cm. The anodically oxidized samples showed no evidence of surface states. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1964
Accession Number
AD0608989

Entities

People

  • G. Rupprecht
  • J. Gilbert
  • P. H. Smakula

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Chemical Reaction Properties
  • Chemical Reactions
  • Compound Semiconductors
  • Electronics
  • Energy
  • Heat Of Activation
  • Inorganic Carbon Compounds
  • Oxidation
  • Semiconductors
  • Solid State Electronics

Readers

  • Electrical Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics