USE OF A MASS SPECTROMETER TO STUDY THE HIGH-TEMPERATURE KINETICS OF THE VAPORIZATION OF NON-STOICHIOMETRIC TIO2.

Abstract

In order to demonstrate the feasibility of studying the high-temperature kinetics of vaporization in a solid source (combination surface ionization-electron affinity) mass spectrometer, the kinetics of the vaporization of non-stoichiometric TiO2 under high vacuum were observed between 1115K and 2045K. A van't Hoff differential method analysis was performed on the raw data to determine the reaction-rate order. A first-order reaction-rate process was indicated in both cases. Rate constants for both processes, as well as for the overall vaporization on non-stoichiometric TiO2, were calculated at approximately 50K intervals between 1115K and 2045K. An Arrhenius-type analysis was performed and activation energies were observed. A thorough investigation was made of the possible systematic and random errors involved in using a solid source mass spectrometer to study the kinetics of high-temperature vaporization. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1964
Accession Number
AD0609319

Entities

People

  • Samuel F. Hulbert

Organizations

  • State University of New York

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Chemical Reaction Properties
  • Chemical Reactions
  • Heat Of Activation
  • High Temperature
  • High Vacuum
  • Kinetics
  • Mass Spectrometers
  • Spectrometers
  • Transition Temperature
  • Vaporization

Readers

  • Materials Science and Engineering.
  • Molecular Photonics/Laser Physics
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Microelectronics