A STUDY OF THE PLASMA BOUNDARY.
Abstract
This study is concerned with an experimental investigation of the static and dynamic properties of the plasma sheath. The basic experimental technique was to pass an electron beam through the sheath parallel to the wall and, by measuring the deflection of the beam, transverse dc and rf electric fields in the sheath are measured. Measurements of the dc fields are compared with a theory based on a solution of the complete plasma-sheath equation. By means of this comparison it is possible to accurately evaluate the plasma parameters n sub e and T sub e. It is found that in the quiescent sheath, no rf fields are detected that exceed the sensitivity limit of the measurements, which is 1 v/cm. To observe the variation of externally applied rf fields through the sheath and plasma, rf voltage is applied to the plate forming the sheath, and the phase and amplitude of the resulting fields in the plasma are measured with the electron beam by using a null technique. The results are compared with a theory based on an integration of the collisionless Boltzmann equation. The boundary conditions of waves propagating in the plasma are determined by the rf properties of the sheath, and in some cases sheath losses can form the principal source of attenuation for such waves.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1964
- Accession Number
- AD0609567
Entities
People
- R. S. Harp
Organizations
- Stanford University