A FUNDAMENTAL STUDY OF EPITAXY BY FLASH EVAPORATION.

Abstract

Electrical measurements have been made on InSb films deposited on mica substrates. The perfection of isoepitaxially deposited InSb films has been studied using X-ray double diffractometer methods. Films of high crystalline quality have been deposited. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 30, 1964
Accession Number
AD0610133

Entities

People

  • John L. Richards

Tags

DTIC Thesaurus Topics

  • Diffractometers
  • Electrical Measurement
  • Evaporation
  • Measurement
  • Measuring Instruments
  • Substrates
  • X Rays

Fields of Study

  • Materials science

Readers

  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology