PRODUCTION ENGINEERING MEASURE FOR THE PRODUCTION OF SILICON MONOXIDE CAPACITORS MICROELEMENT.

Abstract

More uniform capacitance values were obtained by centering the evaporation source below the substrate holder. Improvement in yield was obtained by clearing the microelements by capacitor discharge and improving the pattern of the 2-capacitor mask. There appears to be a relationship between dissipation factor and insulation resistance. Both parameters can be improved by proper heat-treatment. Recently obtained glazed and metallized substrates, commercially fabricated, are inferior to previous substrates on which previous work was based. Long term life tests of the 560 pf units have completed almost 1000 hours. (Author)

Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1964
Accession Number
AD0610461

Entities

People

  • J. J. O'connor

Organizations

  • Cornell Dubilier

Tags

DTIC Thesaurus Topics

  • Capacitance
  • Capacitors
  • Dissipation
  • Dissipation Factor
  • Engineering
  • Heat Energy
  • Heat Treatment
  • Life Tests
  • Production
  • Production Engineering
  • Substrates

Readers

  • Electrical Engineering
  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems