PLANARIZED GERMANIUM SWITCHING TRANSISTOR.
Abstract
A planar germanium technology was developed for microwave switching transistors. A suitable expanded contact system was developed, getting away from chisel bonding damage. The germanium planar program is considered a major step in higher speed switching devices, with favorable implications of germanium integrated circuits. Enclosed data show the accomplishments of the program. The planar process can be easily set up for production.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 30, 1964
- Accession Number
- AD0610606
Entities
Organizations
- Massachusetts Institute of Technology