VAPOR DEPOSITED THIN FILM PIEZOELECTRIC TRANSDUCERS,

Abstract

A new vapor deposition technique has been developed for the production of insulating thin film CdS and ZnS piezoelectric transducers. These high efficiency transducers have been used to generate either shear or compressional waves in dielectric materials at frequencies in the gigacycle range. The thickness, which is measured by means of a quartz crystal microbalance, is controlled to produce films which operate at their fundamental resonance. The mode of the generated waves is determined by the orientation of the driving electric field with respect to the crystal axes of the film transducer. (Author)

Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1965
Accession Number
AD0613540

Entities

People

  • E. F. Kelly
  • J. De Klerk

Tags

DTIC Thesaurus Topics

  • Dielectrics
  • Electric Fields
  • Films
  • Frequency
  • Materials
  • Materials Processing
  • Microbalances
  • Piezoelectric Transducers
  • Quartz Crystal Microbalances
  • Thin Films
  • Transducers
  • Vapor Deposition

Fields of Study

  • Physics

Readers

  • Atmospheric Science / Meteorology, specifically Wind Wave Turbulence.
  • Fluid Dynamics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems