MECHANISM OF HIGH CONDUCTIVITY IN VACUUMDEPOSITED CADMIUM SULFIDE FILMS,
Abstract
Cadmium sulfide thin films are of interest for various electronic device applications. Films deposited on cold substrates have high conductivities unsuitable for device utilization and must be heat-treated to improve their properties. This investigation was therefore concerned with the high conductivity and phenomena resulting from heat-treatment to elucidate the mechanism that gives rise to them. Based on kinetic measurements made during heat-treatment and other experiments, it is concluded that the high conductivity is caused by a nonstoichiometric excess of cadmium in the films. During heat-treatment, the excess cadmium diffuses to the film surface where it evaporates, with diffusion being the rate-controlling mechanism. Also, the as-deposited films contain a number of electron trapping sites, most of which are annealed out during heat treatment. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 02, 1965
- Accession Number
- AD0615269
Entities
People
- D. W. Readey
Organizations
- Harry Diamond Laboratories