PRODUCTION ENGINEERING MEASURE FOR IMPROVEMENT OF PRODUCTION TECHNIQUES TO INCREASE THE RELIABILITY FOR PNP INTERMEDIATE POWER SILICON PLANAR SWITCHING TRANSISTORS INCLUDING 2N3502.

Abstract

Thorough evaluation of the test results, accumulated during the operation of the test-masking line built by Fairchild, proved the feasibility of the mechanized semiautomatic masking process. However, a modification of the mechanical concept was necessary for the post exposure part. Through a long term systematically determined evaluation program, it was found that improvements had to be made in certain areas of the Optical Alignment Jig. The areas were in the Microscope Assembly, Light Source Assembly and Chuck and Positioner Assembly. A preliminary survey of the 2N3502 devices was made. The survey indicated that Beta variation is most pronounced in the vertical direction of a wafer; it is maximum on top of the wafer and minimum at the bottom. This directional, rather than random variation of Beta, indicated several possible causes, some of which have been investigated. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 31, 1965
Accession Number
AD0617893

Entities

People

  • J. C. Diepeveen
  • R. C. Dorilag

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Assembly
  • Directional
  • Engineering
  • Light Sources
  • Manufacturing
  • Mass Production
  • Microscopes
  • Production
  • Production Engineering
  • Production Management Methods
  • Productivity
  • Reliability
  • Semiautomatic
  • Switching
  • Test And Evaluation

Readers

  • Integrated Circuit Design and Technology.
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design