FEASIBILITY STUDY OF METAL BASE TRANSISTOR.
Abstract
The molybdenum-silicon phases produced by chemical vapor deposition of molybdenum on (111) Si substrates have been investigated by electron diffraction, microwave absorption, and electron microscopy. Details of some of these phases have been determined, and important differences in the resistances of (100) Si and (111) Si surfaces to molybdenum penetration have been noted. In at least one case, a layer deposited at 700C has retained its metallic character after being heated to 1200C. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 30, 1965
- Accession Number
- AD0619143
Entities
People
- F. L. Vogel
- J. J. Casey
- P. M. Kennedy
Organizations
- Sprague Electric