PRODUCTION ENGINEERING MEASURE FOR SILICON OVERLAY TRANSISTORS.
Abstract
New base predeposition and base diffusion systems were put into production and evaluated. Work was started on a new emitter and gold diffusion process. Work was started on the emitter stripe width evaluation. Chemical etching was placed into production and work on slurry polishing is almost complete. A new photoresist was evaluated and production controls are presently being applied. New assembly parts and processes were evaluated from the assembly viewpoint. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1965
- Accession Number
- AD0619295
Entities
People
- Thomas Kearkuff
Organizations
- Motorola Mobility