RESEARCH ON PLASMA BOUNDARY STUDIES.
Abstract
The main purpose of this study was to obtain a thorough understanding of the static and rf properties of the sheath of a low pressure discharge plasma, and to arrive at simplified boundary conditions for rf fields which take account of the presence of the sheath at the edge of the plasma. Theoretical and experimental studies of both the rf and dc properties of the sheath have been undertaken and good agreement obtained between theory and experiment.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1965
- Accession Number
- AD0622271
Entities
People
- G. Kino
- J. Pavcovitch
- S. Self
Organizations
- Stanford University