INVESTIGATION OF HIGH POWER GASEOUS ELECTRONICS.

Abstract

Clean-up of mixtures of argon, ammonia, water vapor, hydrogen, and air in a TR tube were investigated with the aid of a mass spectrometer. The following types of cleanup were observed over a 20-300C temperature range: (1) initial physical and chemical adsorption, (2) clean-up due to a glow discharge at a stainless steel electrode, (3) clean-up due to a 1 watt RF discharge between nickel cones, and (4) clean-up due to a 10 watt RF discharge at a window composed of 7070 glass sealed to a kovar iris. Clean-up of argon was small compared to clean-up observed for the remaining gases. Initial physisorption of ammonia and water vapor occurred compared to initial chemisorption of oxygen in an air-argon mixture. The discharges produced dissociation of NH3 and H2O followed by diffusion controlled clean-up of H2. In air the discharges caused chemisorption of oxygen. Diffusion controlled thermal recovery of H2 was observed following termination of the 10 watt H2 and NH3 discharges. No thermal recovery occurred following H2O and air discharges in which O2 was chemisorbed. The relationship between the role of dissociative attachment of electrons to reduce signal recovery time and the subsequent clean-up of the dissociation products is discussed. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 15, 1965
Accession Number
AD0622683

Entities

People

  • H. S. Maddix

Organizations

  • M/A-COM Technology Solutions

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Adsorption
  • Chemisorption
  • Diffusion
  • Dissociation
  • Electronics
  • Gaseous Electronics
  • Glow Discharges
  • Mass Spectrometers
  • Recovery
  • Spectrometers
  • Stainless Steel
  • Vapors
  • Water Vapor

Readers

  • Combustion science or combustion engineering.
  • Electrochemical Engineering/ Fuel Cell Technologies
  • Environmental Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene