VACUUM-DEPOSITED CADMIUM SULFIDE THIN FILMS,
Abstract
Cadmium sulfides was vacuum-deposited onto glass substrates at approximately 0.00002 torr using electron beam heating. Initial resistivities were in the range 0.1 to 1 ohm-cm. After heating in vacuum at 360 to 370C for 1/2 hr, the resistivities increased to the range 0.3 to 300,000 ohm-cm. To correlate resistivity with crystal structure, the cadmium sulfide films were studied by means of X-ray and electron diffraction, and spectrophotometry. It was found that these cadmium sulfide films were hexagonal and highly oriented with the c-axis perpendicular to the plane of the substrate. Grain size perpendicular to the c-axis was much less than 100 A after deposition onto room-temperature substrates, and increased to 100 to 200 A in diameter after heat treatment. To determine the type of contact the commonly deposited metals make to cadmium sulfide, a mask changer was employed to allow the deposition of layerized arrays of metal-cadmium sulfide-metal in a single pumpdown. Aluminum, indium, silver, and gold were thereby deposited in several different electrode combinations. Combinations having aluminum as one (or both) of the electrodes exhibited rectifying characteristics; all other combinations exhibited ohmic characteristics. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 20, 1965
- Accession Number
- AD0622695
Entities
People
- D. W. Readey
- G. G. Avis
- W. C. Boesman
Organizations
- Harry Diamond Laboratories