A LOW ENERGY NITROGEN ION BEAM.
Abstract
Apparatus has been constructed for the production of a Nitrogen ion beam (N2+) within the energy range 5 to 30eV. Retarding field analysis of the ion energy distribution of a typical 8eV (nominal) beam reveals a width at half maximum of 0.25eV, 50 percent of the ions being within 0.4eV, and 90 percent within a 1.25eV energy range. Present intensities are of the order 10 to the 9th power ions/sq cm -sec. Estimates of the ion reflection coefficient and secondary electron emission coefficient have been obtained during calibration, at energies sparsely reported in the literature, and are in general agreement with existing data, where available. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1965
- Accession Number
- AD0623776
Entities
People
- R. H. Prince
Organizations
- University of Toronto