THIN FILM THERMISTORS.
Abstract
The thermistors to be developed under this program are discrete components and of course may be adapted to a variety of applications besides microcircuitry. They may be used for surface temperature sensing, probes and any of the applications for which thermistors are used. The geometrical shape may be a film on a disk, rod or flat wafer, this again according to the application. The equipment with the exception of the R. F. Unit Power Supply is set up and operating. Various parameters have been established so that uniform coatings can be obtained at various rates of deposition. Rates of deposition have also been established for various elements and compounds as well as completion of a literature survey. Rates of deposition for volume resistivities of 300 ohm cm are somewhat slow, but very controllable, and are still useful. Ratios can be maintained from the bulk to film thickness down to 100 A. Surface resistivities are somewhat high as one might expect from so thin a film. Electrodes of gold have proven feasible and platinum leads (.001 diameter) have been successfully welded to these electrodes. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 27, 1965
- Accession Number
- AD0624465