SPUTTERING.
Abstract
Measurement of the Doppler shift of light emitted in the direction of travel by sputtered Mo and Ag atoms have verified time-of-flight measurements of ejection energies of sputtered atoms. The Doppler shift measurements, being dependent on the distribution of energies of sputtered atoms, provide much stronger substantiation of time-of-flight data than that provided by agreement with average ejection energy measurements. The Doppler shift measurements have substantiated not only numerical values of ejection energies but also the shape of the distribution function. The dependence of the high energy tail on bombarding ion energy and the lack of dependence of the most probable ejection energy on bombarding ion energy are also verified by the Doppler shift measurements. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1965
- Accession Number
- AD0625776
Entities
People
- G. K. Wehner
- R. V. Stuart