PINHOLE ARRAY CAMERA FOR INTEGRATED CIRCUITS,
Abstract
A pinhole camera for the production of multiple images for integrated circuits, consisting of an array of precisely positioned uniform diameter pinholes and a vacuum back to hold the film or plate, has been designed, fabricated, and tested. This camera was designed to replace the step-and-repeat camera method of producing multiple images that is presently used. The two basic requirements for repetition of circuit patterns are the achievement of high image quality and precise registration between all the masks in a set. The arrangement discussed here permits lines of .0005'' width in the final working mask with precise registration. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1966
- Accession Number
- AD0628485
Entities
People
- Phillip A. Newman
- Vincent E. Rible
Organizations
- United States Army Communications-Electronics Command