REFINEMENT OF NAFI THIN FILM PRODUCTION TECHNIQUES.
Abstract
Preparation of thin film electronic circuit panels by vacuum deposition is practical through both batch and In-Line machine processing. The feasibility of the thin film vacuum deposition technology employed by NAFI in the preparation of electronic circuit panels was demonstrated in both the batch and In-Line mode of operation. Although extensive thin film production refinement was accomplished, additional improvement of the evaporation mechanisms and controls are required to utilize fully the potential of the In-Line fabricating machinery and process. The recommendations embodied in the report represent recognition of inadequacies in the facilities which prevent process optimization. An extensive engineering analysis of the In-Line machine problems will be required to establish the scope of source redesign and control revisions necessary to attain the yield and reproducibility capabilities considered inherent with the technology employed. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 31, 1965
- Accession Number
- AD0629274
Entities
People
- Clifford M. Ault
Organizations
- Naval Air Warfare Center, Indianapolis