SILICON MONOXIDE BAFFLED BOX EVAPORATION SOURCE CAPABILITY.

Abstract

The report outlines the characteristics of operation, control and film distribution attainable with a Baffled Box type SiO evaporation source in the In-Line Thin Film deposition machine. (Author)

Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1965
Accession Number
AD0629706

Entities

People

  • C. M. Ault

Organizations

  • Naval Air Warfare Center, Indianapolis

Tags

DTIC Thesaurus Topics

  • Chemical Compounds
  • Evaporation
  • Films
  • Isothermal Processes
  • Materials
  • Monoxides
  • Ores
  • Oxides
  • Oxygen Compounds
  • Phase Transformations
  • Thin Films

Readers

  • Human-Computer Interaction (HCI).
  • Systems Analysis and Design
  • Thin Film Deposition Science.