THIN-FILM POLYCRYSTALLINE FIELD-EFFECT TRIODE.
Abstract
A process for fabricating CdSe thin-film-transistors (TFT's) reproducibly in large arrays has been developed. The deposition of the semiconductor by evaporation upon an unheated substrate is controlled by means of electrical monitoring of a sample TFT deposited on the same blank with the circuit array. Wire grill masks in the vacuum system are used to define the patterns. Integrated thin-film circuits incorporating 540 CdSe TFT's have operated continuously for more than 500 hours without failure. The Hall mobility and resistivity of vacuum -deposited CdSe films have been studied for various deposition conditions. Metal-insulator-semiconductor (M-I-S) structures have been used to study instability mechanisms in the TFT. A systematic program of fabrication and life-testing of CdS TFT's is being carried out. Analog and digital circuits incorporating TFT's were studied. Masks were designed and ordered for a three-input digital gate. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1965
- Accession Number
- AD0631408
Entities
People
- H. Borkan
- J. J. Bowe
- P. K. Weimer
- R. S. Hopkins
- V. L. Frantz
Organizations
- RCA Corporation