THE EFFECT OF ANNEALING THIN FILM CAPACITORS,

Abstract

An annealing treatment upon thin film capacitors using silicon monoxide (SiO) as the dielectric will significantly increase the d-c resistance and decrease the capacitive dissipation of good thin film capacitors. However, initially inferior capacitors generally do not show improvement after annealing. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 27, 1965
Accession Number
AD0631955

Entities

People

  • W. M. Mcguire

Organizations

  • Naval Air Warfare Center, Indianapolis

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Annealing
  • Capacitors
  • Dissipation
  • Films
  • Monoxides
  • Resistance
  • Thin Film Capacitors
  • Thin Films

Readers

  • Electrical Engineering
  • Thin Film Deposition Science.