EVALUATION OF STANDARD ALUMINUM ELECTRODE THIN FILM CAPACITORS.

Abstract

The report shows that the characteristics of thin film capacitors utilizing aluminum electrodes and SiO dielectrics can be improved by annealing at 450C. Some indication is given to the effects of various process parameters during dielectric deposition and supports the general concensus that consistently good thin film capacitors are rather difficult to fabricate. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 17, 1965
Accession Number
AD0632028

Entities

People

  • W. Mcguire

Organizations

  • Naval Air Warfare Center, Indianapolis

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Aluminum
  • Annealing
  • Capacitors
  • Dielectrics
  • Electrodes
  • Films
  • Standards
  • Test And Evaluation
  • Thin Film Capacitors
  • Thin Films

Readers

  • Regression Analysis.
  • Semiconductor Device Technology