THEORETICAL AND EXPERIMENTAL STUDIES OF THE UNDERLYING PROCESSES AND TECHNIQUES OF LOW PRESSURE MEASUREMENT.
Abstract
The report relates work done over the past several years in the field of low pressure measurement. Particular emphasis is placed on the development of the suppressor (Schuemann) gauge developed at this laboratory. Other work with total and partial pressure gauges is reported. Related work in surface physics is also discussed in detail. New material not reported in detail in earlier reports includes discussions of (1) pumping speeds of getter-ion pumps at low pressures and (2) bakeout procedures for small glass ultrahigh vacuum systems and reduction of O2 to CO conversion. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1966
- Accession Number
- AD0632596
Entities
Organizations
- University of Illinois Urbana–Champaign