TRANSFER OF FABRICATION TECHNOLOGIES OF THIN FILM ACTIVE AND EXTREME ENVIRONMENT PASSIVE DEVICES.

Abstract

The report describes the transfer of vacuum deposition technologies relative to thin film active devices and high temperature passive devices from Melpar, Incorporated, to the U. S. Naval Avionics Facility, Indianapolis. Detailed descriptions are included of apparatus, materials, test equipment, fabrication procedures, and process parameters. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 15, 1966
Accession Number
AD0633009

Entities

People

  • M. G. Cowart
  • William Mcguire

Organizations

  • Naval Air Warfare Center, Indianapolis

Tags

DTIC Thesaurus Topics

  • Avionics
  • Electronic Equipment
  • Environment
  • Extreme Environments
  • Fabrication
  • Films
  • High Temperature
  • Materials
  • Materials Processing
  • Test Equipment
  • Thin Films
  • Vacuum Deposition

Readers

  • Aerospace Test and Evaluation
  • Materials Science and Engineering.
  • Thin Film Deposition Science.