A STUDY OF THE PROTECTIVE EFFECT OF A THIN FILM ON A SURFACE EXPOSED TO SPUTTERING.

Abstract

A serious problem in the design of plasma devices has been the erosion of material surfaces in contact with an energetic plasma. A technique for the protection of surfaces exposed to the destructive effects of sputtering was investigated. The technique involves the coating of a metallic substrate (tantalum) with a thin protective film of gallium. Although no quantitative measurements of the protective effect were obtained, the existence of the protective effect was definitely established. The effect was found to be substantial at ion energies near the threshold potential. However, the effect was found to have an upper limit near or below 100 ev. This protective effect would have its best application under conditions of high current density and low bombardment energies.

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1966
Accession Number
AD0633670

Entities

People

  • Robert Kelley Parker

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Coatings
  • Current Density
  • Erosion
  • Films
  • Materials
  • Measurement
  • Plasmonic Devices
  • Sputtering
  • Substrates
  • Tantalum
  • Thin Films

Fields of Study

  • Physics

Readers

  • Materials Science
  • Plasma Physics / Magnetohydrodynamics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene