THIN FILM TECHNIQUES FOR SILICON INTEGRATED CIRCUITS.
Abstract
Resistance of electron beam evaporated cermet films was extended to 30,000 ohms/sq. Using the 30 percent A12O3, 70 percent (TaSi and Cr3Si) powder, reproducibility of cermet deposition is being determined. Series of experiments on sputtered tantalum-silicon resistor films were initiated. Concentric circle 50-ohm resistors were fabricated for the ultrahigh frequency measurements experiments. Reactively sputtered Ta2O5 and SiN2 capacitors to 1.5 pf/sq mil and 0.5 pf/sq mil, respectively. 1000 hour 200C storage tests were completed on 100 IC892 resistor-transistor -capacitor units. IC772 circuit performance was reviewed using 200 ohms/sq and 2500 ohms/sq resistors. IC772 was redesigned to include coupling capacitor. Circular 50-ohm thin film resistor characteristics were measured up to 1000 MHz. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1966
- Accession Number
- AD0633777
Entities
People
- F. Mancini
- L. E. Terry
Organizations
- Motorola Mobility