SEMICONDUCTOR WAFER-BONDER,
Abstract
A device for bonding semiconductor devices to headers is described. Individual dice are picked up from an indexing disc with a vacuum pencil and positioned over the header. The weight of the pencil serves as a pressure source on the transistor die while the heat is supplied through a filament heater. The bonding operation is carried out in a forming gas atmosphere. Construction of the instrument and operating procedures are described. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1966
- Accession Number
- AD0634030
Entities
People
- Robert J. Anstead
Organizations
- Harry Diamond Laboratories