PRODUCTION ENGINEERING MEASURE ON 2N3375 SILICON OVERLAY TRANSISTOR.
Abstract
All processing investigations have been completed and the production runs were started early in February. The improvements and modifications in processing incorporated into the production run are; (1) bulk material improvement, (2) surface stability improvement, (3) metallization interface improvement, (4) improved photolithography, (5) improved wafer handling, and (6) hot spot detection. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1966
- Accession Number
- AD0634048
Entities
People
- F. Tumbelty
- J. C. Laberge