CHROMIUM MASKS FOR MICROCIRCUITRY.

Abstract

A method for preparing durable chromium films which may be used as masks in making photoresist patterns for microcircuitry has been developed. Films deposited by this method were found to have excellent adhesion to glass and silicon and produced good uniform and reproducible patterns. A technique for etching chromium films was developed using a photoresist process and an acid and metal etchant. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 01, 1966
Accession Number
AD0634762

Entities

People

  • Alex Rogel

Organizations

  • United States Army Communications-Electronics Command

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Adhesion
  • Chromium
  • Elements
  • Group 6 Elements
  • Metals
  • Physical Properties
  • Refractory Metals

Readers

  • Nanofabrication and Microfabrication.
  • Surface Engineering/Surface Coating Technology.