PHOTOMETALLIC PROCESS INVESTIGATION.

Abstract

The project has as its ultimate objective the fabrication of microminiature circuits in gold, nichrome, aluminum and silica by a process in which these materials are etched directly by a photosensitive material according to an incident light pattern. The evaluation of potential light sensitive halogens was extended. Spectrophotometric studies of chloro, bromo and iodo systems for etching gold were conducted. Etchant products are identified and etching mechanisms are proposed. Studies of the compatibility of polymers, solvents, and photo etchants were conducted. Reaction rate studies were initiated. The production of circuit patterns in gold and nichrome by several photometallic systems was demonstrated. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jun 14, 1966
Accession Number
AD0635143

Entities

People

  • D. L. Schaefer
  • J. F. Burgess

Organizations

  • General Electric

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Chemical Reaction Properties
  • Elements
  • Fabrication
  • Materials
  • Production
  • Test And Evaluation

Readers

  • Integrated Circuit Design and Technology.
  • Nanofabrication and Microfabrication.
  • Organic Chemistry