PRODUCTION ENGINEERING MEASURE FOR SILICON NPN SWITCHING TRANSISTORS.
Abstract
Areas of progress during the quarter were as follows: (1) Evaluation of decreased substrate resistivity initiated. (2) Evaluation of increased breakdown voltage range initiated. (3) Tests of increased diffusion source time completed. (4) Evaluation probe measurements reviewed and standardized. (5) New emulsion developer installed. (6) Evaluation of photoresist coating thickness versus spin velocity completed. (7) Refined oxide etching techniques. (8) Preliminary evaluation of centrifuged KMER completed. (9) Investigation of metallization thicknesses versus pattern definition initiated. (10) Evaluation of experimental header capacitances completed. (11) All testing completed on Engineering Sample No. 1 units. (12) Engineering Sample No. 2 units delivered to the customer. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 25, 1966
- Accession Number
- AD0640484
Entities
People
- Jack Freese
- Mark Siegel
Organizations
- Motorola Mobility